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发明名称
A COMPARTMENT FOR MAINTAINING A CLEAN PRODUCTION ENVIRONMENT
摘要
申请公布号
SG106101(A1)
申请公布日期
2004.09.30
申请号
SG20020006041
申请日期
2002.10.04
申请人
ASM TECHNOLOGY SINGAPORE PTE LTD
发明人
HOW WEE KIUN, FRANCIS;ZHANG JIAN;TAN LIAN HOK
分类号
B01D46/42;(IPC1-7):B01D46/00
主分类号
B01D46/42
代理机构
代理人
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地址
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