| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment apparatus equipped with a mechanism which suppresses transmission of vibration in a vacuum pump to a vacuum chamber. SOLUTION: The vacuum treatment apparatus is equipped with a vacuum chamber 16, a vacuum pump 18, a pipe 30 connecting the vacuum chamber and the vacuum pump to evacuate the vacuum chamber, a flexible pipe 36 included as part of the pipe 30, and a mechanism 46 to fix the flexible pipe 36 so that the tube does not contract during pressure reduction. COPYRIGHT: (C)2004,JPO&NCIPI
|
