| 摘要 |
A sensor chip for a semiconductor sensor includes, fixed electrodes, movable electrodes facing the fixed electrodes, and beams connected to the movable electrodes. Additional movable electrodes are provided between the beams and the fixed electrodes, which are closest to the beams. Thus, even when acceleration is applied, only the additional movable electrodes are brought into contact with the beams and hence no circuit shorting between the fixed electrodes and the beams is caused. As a result, a shield effect can be realized even though shield electrodes are not provided.
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