发明名称 |
MEMS VARIABLE INDUCTOR AND CAPACITOR |
摘要 |
A variable passive component is provided for fabrication on a microelectromechanical system (MEMS) device. A conductive portion is provided on a low-profile sliding dielectric sheet that cooperates with a conductive portion disposed on a substrate to provide a variable passive component. The passive component can be a variable inductor provided by moving a shorted spiral inductor formed on the dielectric sheet over a spiral inductor on the substrate with varying degrees of overlap causing varying inductance values. The passive component can be a variable capacitor that consists of a large conductive pad on a dielectric plate which slides over two adjacent pads on the substrate with varying overlap causing varying capacitance values.
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申请公布号 |
US2004190217(A1) |
申请公布日期 |
2004.09.30 |
申请号 |
US20030402032 |
申请日期 |
2003.03.28 |
申请人 |
STOKES ROBERT B. |
发明人 |
STOKES ROBERT B. |
分类号 |
H05K1/16;H01F17/00;H01F21/04;H01G5/04;H01G5/14;H03H7/01;(IPC1-7):H01G5/00 |
主分类号 |
H05K1/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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