MICRO MIRROR DEVICE, METHOD FOR FORMING THE SAME AND METHOD FOR CONTROLLING LIGHT BY USING THE MICRO MIRROR DEVICE, IN WHICH ANGLE OF LIGHT REFLECTED FROM MICRO MIRROR DEVICE IS EFFECTIVELY INCREASED

摘要

PURPOSE: A micro mirror device, a method for forming the same and a method for controlling a light by using the micro mirror device are provided to effectively increase the angle of light reflected from the micro mirror device without increasing the rotation or slope of the mirror. CONSTITUTION: A micro mirror device(10) includes a plate(30), a reflective device(42) and a fluid(52,53). The plate defines the cavity between the substrate. The reflective device is placed between the substrate and the plate. The fluid is positioned between the reflective device in the cavity and the plate and has a reflective index larger than 1. The reflective device moves between the first position and the second position.