| 摘要 |
PURPOSE: A vacuum processing apparatus is provided to prevent vibration of a vacuum pump from being transferred to a vacuum chamber. CONSTITUTION: A vacuum processing apparatus includes a vacuum chamber(16), at least one vacuum pump(18), a pipe(30) for connecting the vacuum chamber to the vacuum pump to exhaust the vacuum chamber, and a flexible tube(36) included in the pipe, and a fixing member(46) for fixing the flexible tube such that the flexible tube is not contracted when pressure is reduced. The vibration of the vacuum pump is not transmitted to the vacuum chamber because the fixing member fixes the flexible tube such that the flexible tube is not contracted in the event of reduction of pressure.
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