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发明名称
APPARATUS AND METHOD FOR DEPOSITING LARGE AREA COATINGS ON PLANAR SURFACES
摘要
申请公布号
AU2003211169(A1)
申请公布日期
2004.09.17
申请号
AU20030211169
申请日期
2003.02.20
申请人
GENERAL ELECTRIC COMPANY
发明人
MARC SCHAEPKENS
分类号
C23C16/44;C23C16/455;C23C16/50;C23C16/513;H01J37/32;(IPC1-7):C23C16/513
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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