| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple and safe method for correcting the irradiation position of a laser beam. SOLUTION: According to the indication from a laser controller 4, a laser device 1 arranges semiconductor position detection elements 3 at nine prescribed positions on a stage, the prescribed positions on the semiconductor position detection elements 3 is irradiated with laser beams, and each semiconductor position detection element 3 detects the actually exposed irradiation position and transmits the data on the detection position to the laser controller 4. The laser controller 4 transmits the data on the detection position and the data on the irradiation position indicated to the laser device 1 to a control PC (Personal Computer) 5 connected by an LAN (Local Area Network). The control PC 5 calculates the deviation of the irradiation position from each data, and indicates the correction of the position to the laser controller 4 on the basis of the above correction data. COPYRIGHT: (C)2004,JPO&NCIPI |
