SIX-LEGGED TYPE PIEZOELECTRIC VIBRATION GYROSCOPE

摘要

A six-legged type piezoelectric vibration gyroscope comprising a pair of exciting arms (3a, 3b) extending from a body (2) in a first direction (A1) with a space therebetween, one non-exciting arm (3c) extending in the first direction between the exciting arms from the body, a pair of detecting arms (4a, 4b) extending from the body in a second direction (A2) with a space therebetween, and one non-detecting arm (4c) extending in the second direction between the detecting arms from the body. The exciting arms are coupled with a drive-side electrode. The detecting arms are coupled with a detection-side electrode. The exciting arms, non-exciting arm, detecting arms, and non-detecting arm respectively consist of a piezoelectric. The respective exciting arms differ in width size from the non-exciting arm. The respective exciting arms differ in width size from the respective detecting arms. The respective exciting arms differ in width size from the non-detecting arm.