| 发明名称 |
Production of material libraries using sputter methods |
| 摘要 |
In a process for the combinatorial production of a library of materials in the form of a two-dimensional matrix in the surface region of a planar substrate by sputtering, the planar target used for the sputtering is arranged in parallel to the planar substrate and has surface regions of different chemical composition.
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| 申请公布号 |
US6790322(B2) |
申请公布日期 |
2004.09.14 |
| 申请号 |
US20020149753 |
申请日期 |
2002.11.13 |
| 申请人 |
HTE AKTIENGESELLSCHAFT THE HIGH THROUGHPUT EXPERIMENTATION COMPANY |
发明人 |
SCHUNK STEPHAN A.;DEMUTH DIRK;HIBST HARTMUT |
| 分类号 |
B01J19/00;C23C14/34;C40B30/08;C40B40/18;C40B60/14;(IPC1-7):C23C14/34 |
主分类号 |
B01J19/00 |
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