GROUNDPLATE OF ION INJECTION APPARATUS CAPABLE OF AVOIDING DAMAGE ON THE EQUIPMENT DUE TO SCREW TAP ABRASION

摘要

PURPOSE: A groundplate of an ion injection apparatus is provided to shorten the work time when assembling or disassembling the ground electrode plate and avoid the damage on the equipment due to a screw tap abrasion. CONSTITUTION: A ground electrode plate of an ion injection apparatus comprises a circular plate(60) formed with a circular shape; a center hole(66) formed at the center of the circular plate; a plurality of holes(64) formed on the circular plate with a predetermined interval to insert a screw; and a protrusion part(62) formed integrally with the circular plate at the end part of the center hole.