发明名称 SPUTTERING TARGET CONTAINING ZINC SULFIDE AS MAJOR COMPONENT, OPTICAL RECORDING MEDIUM ON WHICH PHASE CHANGE OPTICAL DISK PROTECTIVE FILM CONTAINING ZINC SULFIDE AS MAJOR COMPONENT IS FORMED BY USING THE TARGET, AND METHOD FOR MANUFACTURING THE SPUTTERING TARGET
摘要 Provided is a sputtering target and an optical recording medium having formed thereon a phase change optical disc protective film having zinc sulfide as its principal component employing such a target, as well as the manufacturing method thereof, characterized in that the sputtering target has zinc sulfide as its principal component, and is capable of adjusting the refractive index of a film containing conductive oxide in the range of 2.0 to 2.6. This sputtering target, and an optical recording medium having formed thereon a phase change optical disc protective film having zinc sulfide as its principal component employing such a target, is capable of reducing particles (dust emission) and nodules that arise during sputtering, has minimal variation in quality and is capable of improving mass productiveness, and in which the crystal grain is fine and has a high density of 90% or more.
申请公布号 KR20040078694(A) 申请公布日期 2004.09.10
申请号 KR20047012324 申请日期 2002.12.11
申请人 发明人
分类号 G11B7/24;G11B7/2548;C04B35/547;C23C14/06;C23C14/34;G11B7/26 主分类号 G11B7/24
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