| 摘要 |
PROBLEM TO BE SOLVED: To provide a draining and drying device capable of efficiently removing water deposited to a component to be treated, and reducing energy for drying the part to be treated. SOLUTION: The component to be treated A is immersed in a water draining solvent stored in a water draining vessel 12. The water draining solvent separated from water in a water separating vessel 13 is pressurized by a circulating pump 14 and heated by a heat exchanger 16. The water draining solvent is ejected from a first nozzle 17 the component to be treated A immersed in the water draining solvent in the water draining vessel 12. Since the water draining solvent of the pressurized and superheated state which is ejected from the first nozzle 17 becomes a boiling state by rapidly lowering the pressure, explosive collision force and turbulent flow are generated, and separation of deposited water and permeability of the water draining solvent are increased, whereby the rapid draining of the component to be treated A can be performed even if the component A is of a complex shape. COPYRIGHT: (C)2004,JPO&NCIPI
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