Moving coil linear motor positioning stage with a concentric aperture

摘要

A moving coil linear motor positioning stage with a concentric aperture is disclosed. The present invention relates to positioning an element or device such as an optic or lens. The apparatus is ideal for moving an optic coaxial with a light beam. The present invention uses a voice coil motor with a cylindrical moving coil and a cylindrical permanent magnet assembly with a radial gap. The moving coil and magnet assemblies have clear apertures concentric with the apparatus and the axis of motion. A pair of planar flexures guides the moving coil. A position-sensing device is used to sense the position of the moving coil to enable fine position control.