| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface acoustic wave (SAW) device which has sufficient durability against bending, and its manufacturing method. <P>SOLUTION: In a SAW device 10, a SAW filter element 1 is fixed in a face-down state on a package which includes a mounting substrate 21, a frame-like substrate 22, a lid substrate 23 and a lower substrate 25. The mounting substrate 21 has flexibility so that a mounting area of the SAW filter element 1 is not affected by deformation caused by the deformation of the other substrates (22, 23, 25). In order to realize such flexibility, the thickness of the mounting substrate 21 is made into ≤100 μm, for example. Besides, a cavity 30 is provided below the mounting substrate 21. As a material for forming the mounting substrate 21, an insulating material whose elasticity is comparatively high such as BT (bismaleimide-triazine) resin, polyimide resin or PPE (polyphenylene ether), for example, is used. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
