| 摘要 |
PROBLEM TO BE SOLVED: To provide a deaeration apparatus which is capable of controlling the dissolved air quantity in liquid and has a deaeration film of long life. SOLUTION: Dissolved oxygen quantity of at least one side of coating liquid before deaeration which is fed to a film deaeration apparatus 14 and coating liquid L after deaeration which is discharged from the film deaeration apparatus 14 is measured by at least one of dissolved oxygen meters 30, 32. In accordance with a measured result, a control part 34 adjusts the opening degree of a vacuum valve 22, thereby, the degree of deaeration of the film deaeration apparatus 14 is changed and the fluctuation of the dissolved oxygen quantity in the coating liquid is suppressed. Further, the same load does not apply to the deaeration film 18 at all times, therefore, the service life of the deaeration film 18 is extended and the running cost is reduced. COPYRIGHT: (C)2004,JPO&NCIPI
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