发明名称 Semiconductor device having patterned SOI structure and method for fabricating the same
摘要 A semiconductor device includes a first semiconductor layer, a second semiconductor layer, and a third semiconductor layer. The first semiconductor layer is formed in a first region of the semiconductor substrate. The second semiconductor layer is formed in a second region of the semiconductor substrate with an insulation film interposed between the semiconductor substrate and the second semiconductor layer. The third semiconductor layer is formed in a third region of a part of the semiconductor substrate with the insulation film and the second semiconductor layer extending in the third region and interposed between the semiconductor substrate and the third semiconductor layer. The top surface of the third semiconductor layer is higher than that of the second semiconductor layer in the second region.
申请公布号 US2004169226(A1) 申请公布日期 2004.09.02
申请号 US20040792836 申请日期 2004.03.05
申请人 OYAMATSU HISATO 发明人 OYAMATSU HISATO
分类号 H01L21/66;H01L21/76;H01L21/762;H01L21/8234;H01L21/8242;H01L21/84;H01L27/08;H01L27/088;H01L27/10;H01L27/108;H01L27/12;H01L29/786;(IPC1-7):H01L27/01 主分类号 H01L21/66
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