| 摘要 |
PROBLEM TO BE SOLVED: To prevent imperfect contact of probe pins with respect to all the electrodes of a liquid crystal substrate by reducing the strain of a prober frame. SOLUTION: By generating the bending moment in the prober frame strained by its own weight etc., and lifting deflected portions of the prober frame upward, the strain of the prober frame is reduced, the parallelism between the liquid crystal substrate and the prober frame is enhanced, and the probe pins are made to come into proper contact with all the electrodes of the liquid crystal substrate. A liquid crystal substrate inspection device 10 is a device for inspecting the liquid crystal substrate 3 by the use of a prober 1, and is equipped with a prober attaching frame 2 for attaching the prober 1, and a bending mechanism 4, which generates a bending moment in the prober frame 1a and adjusts the deflection of the prober frame 1a. COPYRIGHT: (C)2004,JPO&NCIPI |
