| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical element which has excellent durability in the practical use as well as excellent antireflection property, heat resistance, chemical resistance and mechanical strength, and to provide a manufacture method of the optical element. <P>SOLUTION: The optical element has metal atom-containing layers on a substrate, at least one layer (X) of the metal atom-containing layers includes nitrogen and carbon and the ratio A of the amount of nitrogen combined with metal atom in the nitrogen included in the layer X to the amount of carbon in the layer X is 0.1-5.0. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
