发明名称 Outer tube made of silicon carbide and thermal treatment system for semiconductors
摘要 In an outer tube, which is made of silicon carbide, and which has an upper portion closed and a lower portion opened, has the lower portion formed with a tapered portion so as to expand a diameter thereof toward a lower end thereof, and has a flange formed on an outer peripheral side of the lower portion; the following conditions are met: 1) a ratio of ta/D1 is from 0.0067 to 0.025, 2) a product of taxD1 is from 600 to 4,000 (mm<2>), 3) (DF2-DF1)xtc/(D1xta) is from 0.1 to 0.7, and 4) L1/L2 is from 1 to 10; where the outer tube has a thickness of ta (mm) and an inner diameter of D1 (mm), the flange has a thickness of tc (mm), an inner diameter of DF1 (mm) and an outer diameter of DF2 (mm), and the tapered portion has a height L1 (mm) and an expanse of L2 (mm).
申请公布号 EP1453079(A2) 申请公布日期 2004.09.01
申请号 EP20040004234 申请日期 2004.02.25
申请人 ASAHI GLASS COMPANY, LIMITED 发明人 TAKATA, MASAAKI;KAGEYAMA, NOBUO;OTAGURO, SUSUMU
分类号 H01L21/324;C23C16/44;H01L21/00;(IPC1-7):H01L21/00 主分类号 H01L21/324
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