发明名称 Coated refractory metal plate having oxide surface layer, and setter during sintering using the same
摘要 <p>A setter used in sintering and having an oxide coating layer is configured such that oxide powder of at least one of, or a mixture of oxide powders of two or more of alumina, silica, zirconia, yttria, titania, magnesia, and calcia is deposited to at least one surface of a metal composed of molybdenum, tungsten, or an alloy of a molybdenum group and a tungsten group, and a deposition surface thereof allows no exposure of the base material. <IMAGE></p>
申请公布号 EP1452618(A2) 申请公布日期 2004.09.01
申请号 EP20040004147 申请日期 2004.02.24
申请人 A.L.M.T. CORP. 发明人 FUKAYA, YOSHITAKE;YOSHIDA, HIROSHI;KATOH, MASAHIRO
分类号 C23C4/18;C23C4/10;C23C24/10;(IPC1-7):C23C4/10;C23C20/08 主分类号 C23C4/18
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