SEMICONDUCTOR FABRICATION APPARATUS

摘要

PURPOSE: A semiconductor fabrication apparatus is provided to reduce a mechanical defect in a high temperature process by fixing a semiconductor substrate on the surface of a substrate. CONSTITUTION: A reaction tube includes an internal cylindrical storage region in order to perform a thermal process for a semiconductor substrate(100). A substrate loading boat(10) is installed in the inside of the reaction tube. The substrate loading boat includes an internal cylindrical storage region and a plurality of holder supporters for loading a plurality of semiconductor substrates. A substrate holder(15) includes a main body loaded on the holder supporter and a dot part projected from the surface of the main body.