| 摘要 |
PROBLEM TO BE SOLVED: To reduce the influence of waviness in a main scale. SOLUTION: In an encoder, two index scales 40, 50 are provided, coherent light which passes through a first lattice 41 and second ones 52, 52A, and 52B formed on the index scales 40 and 50, respectively, is projected to a third lattice 13 formed on a reflex main scale 10, and coherent light by the third lattice 13 is received. COPYRIGHT: (C)2004,JPO&NCIPI
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