VERFAHREN ZUR HERSTELLUNG VON AUS SILIKA BESTEHENDEN ODER VON AUF SILIKA BASIERENDEN DICKEN GLASARTIGEN FILMEN NACH DEM SOL-GEL VERFAHREN UND SO HERGESTELLTE DICKE FILME

摘要

A sol-gel process allowing preparation, on a substrate, of glassy films of silicon oxide or mixed oxides based on silicon oxide, of thickness above 1 micrometer, generally between 2 and 20 micrometers and characterized by absence of defects, that turn out to be particularly suitable as waveguides in flat optical devices.