| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To receive the light from a fluorescent surface with an optical system having a relatively small aperture and converge it on a detector. <P>SOLUTION: In the electron beam apparatus, a sample 21 is irradiated with an electron beam, and an electron beam 6 emitted from the sample 21 is spread by a magnification projection electron optical system 9 to project an image of sample onto a fluorescent surface 11 of a fluorescent board 12. The image on the fluorescent surface 11 is projected by an optical lens system 14 on a detector 15. A part of the fluorescent board 12 from the fluorescent surface 11 to a first curved surface is made of material of which refractive index is larger than 1. Because of the effect of an immersion lens of the fluorescent board 12, the light beam emitted from the fluorescent surface 11 at even a large angle is refracted in the direction making a smaller angle with the optical axis. Then this can converge the light from the fluorescent surface 11 to the detector 15 by receiving with the lens 14 having relatively small aperture. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
