| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-precision gear system measuring instrument that does not generate distortion easily and is in a structure for preventing distortion from being transmitted easily. SOLUTION: The high-precision gear system for measuring the outer shape of an object to be measured comprises a body having a base BS fixed to an installation surface for installing the high-precision gear system measuring instrument, a table TY traveling in the Y direction that can travel horizontally in one direction while being placed on the base, and a table TX traveling in the X direction that supports a measuring probe, and can travel in another horizontal direction that orthogonally crosses the table for traveling in the Y direction; a support of an object to be measured that has the support section of the object to be measured having a mechanism that can travel in the Z-axis direction and can be rotated on the Z axis, supports the object to be measured at the support section of the object to be measured, and is arranged at a position where the measuring probe can be in contact with the object to be measured, and is configured so that it can take a free angle to the installation surface; and a coupling element CB for fixing the support of the object to be measured so that it can be finely adjusted to the body. COPYRIGHT: (C)2004,JPO&NCIPI
|
