| 摘要 |
PROBLEM TO BE SOLVED: To provide drying equipment for an alignment coating layer of a liquid crystal panel of simple configuration to form a dry film of a uniform mirror finished surface state in drying the alignment coating layer of the liquid crystal panel and to form the high-quality dry film by suppressing the trouble by static electricity. SOLUTION: The drying equipment for the alignment coating layer of the liquid crystal panel comprises: hermetic vessels 1 and 2 which house an objective substrate 6 having a tabular form and are hermetically sealed; and suction and decompression mechanisms 8 and 9 which discharge filled gas from the hermetic vessels 1 and 2. The hermetic vessels 1 and 2 are provided with a plurality of supporting pins 3, erecting at such lengths and intervals that the objective substrate 6 are flatly supported. COPYRIGHT: (C)2004,JPO&NCIPI
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