| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing method used for washing a metal mask to be processed with an organic EL material stuck in a washing chamber by using a supercritical fluid or a subcritical fluid-like washing agent, capable of reducing the weight of carbon dioxide of a solvent necessary for filling a barrel part of a high-pressure cell and of ethanol of a modifier by inserting a spacer in the barrel part of the high-pressure cell, capable of making the solvent and the modifier flow along the metal mask to be processed, and capable of efficiently washing out the organic EL material stuck to the metal mask to be processed. SOLUTION: This washing method is used for washing the metal mask to be processed with the organic EL material stuck in the washing chamber by using a supercritical fluid or a subcritical fluid-like washing agent. The spacer is inserted into an unoccupied space in the high-pressure cell. COPYRIGHT: (C)2004,JPO&NCIPI
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