| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that a decrease in the characteristics of an acceleration sensor cannot be avoided by the variations in residual stress since the variations of the adhesion area of resin become large when a regulation board is struck to a narrow gap by a silicon rubber-based resin, where a small-diameter spacer is kneaded, in the acceleration sensor having the regulation board. <P>SOLUTION: In the acceleration sensor, recesses whose depth is smaller than the diameter of a spherical spacer mixed to the silicon rubber-based resin are provided at even number of positions on the surface of the support section of an acceleration sensor element, and the acceleration sensor element is struck to the upper regulation board in the recesses, thus applying a spacer having a large diameter, and preventing a decrease in the characteristics of the acceleration sensor by restraining the variations in resin adhesion area. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
