| 摘要 |
PROBLEM TO BE SOLVED: To provide device and method for removing foreign matter capable of preventing deviation of a polishing position and an excessive polishing state by reducing shavings caused by rubbing of a surface for pressing a polishing tape and the polishing tape. SOLUTION: This device is provided with a horizontally arranged mount, a tape transferring mechanism arranged on an upper side of the mount to continuously transfer the polishing tape 20, and a polishing head 21 vertically movably arranged to press a rear surface of the polishing tape 20 in the direction of the mount and to remove foreign matter A adhered to an object 11 mounted on the mount via the polishing tape 20. The tape transferring mechanism is provided with a lubricant applying means to apply lubricant to a rear surface of an intermediate part of the polishing tape 20 in contact with the polishing head 21. COPYRIGHT: (C)2004,JPO&NCIPI |
