| 摘要 |
PROBLEM TO BE SOLVED: To reliably notify a user of a sample inspection system of the presence of inspection omission and to thereby improve inspection reliability. SOLUTION: The sample inspection system is provided with a first inspection device for inspecting samples, a second inspection device of which the operation is determined by the result of inspection of the first inspection device, a transfer device for transferring the samples to the first and second inspection devices, and a control device for controlling the action of the first and second inspection devices and of the transfer device. The control device evaluates the result of inspection of the first inspection device, determines the operation of the second inspection device on the basis of the result of evaluation, and issues an alarm in the case that the second inspection device is not able to execute the determined action in the sample inspection system. COPYRIGHT: (C)2004,JPO&NCIPI
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