METHODS AND SYSTEMS FOR REDUCING STICK-DOWN WITHIN MEMS STRUCTURES

摘要

A method for reducing the sticking of proof masses (14, 15) in micro-electromechanical systems (MEMS) devices (10) to sense plates (16, 17) in the MEMS device due to acceleration forces to which the MEMS device is subjected. The method includes determining (102) a beginning of acceleration events which would cause proof masses to contact sense plates, reducing (104) sense bias voltages (56) to the sense plates, determining (106) an end of the acceleration event, and increasing (108) sense bias voltages to their former levels.