| 摘要 |
<p>A scanning probe microscope comprising: a probe 1 equipped with a probe tip at its front end, a vibration application portion consisting of a piezoelectric vibrating body 2 and an AC voltage-generating portion 3, a vibration-detecting portion consisting of a quartz oscillator 4 and a current/voltage amplifier circuit 5, a coarse displacement means 6 for bringing the probe close to a surface of a sample, a sample-to-probe distance control means consisting of a Z fine displacement element 11 and a Z servo circuit 12, a two-dimensional scanning means consisting of an XY fine displacement element 13 and an XY scanning circuit 14, and a data processing means 15 for converting a measurement signal into a three-dimensional image. The probe 1 is held to the quartz oscillator 4 by resilient pressure. &lt;IMAGE&gt;</p> |
