| 摘要 |
PURPOSE: A three-dimensional image measuring apparatus is provided to more precisely measure three-dimensional image by removing a shadow by means of a projection part having one or more mirrors, which is capable of conveying an image. CONSTITUTION: A three-dimensional image measuring apparatus includes a work stage(20), a light source(31), a diffraction grating(33), a projection optical system(34), a projection part, a viewing optical system, detector arrays, a frame grabber(53), an image processor(54), and a control part(53). An object(22) to be measured is installed on the work stage(20). The light source(31) emits light. The diffraction grating(33) passes light delivered. The projection part includes appliances having mirrors(36) for reflecting light. The detector arrays detect light. The frame grabber(53) image-processes light and stores the light. The image processor calculates phase of a processed image. The three-dimensional image measuring apparatus includes a plurality of projection parts.
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