发明名称 |
Optical modulator, method of achieving velocity matching and impedance matching of optical modulator, and method of manufacturing optical modulator |
摘要 |
A Mach-Zehnder optical waveguide (12) is disposed in a substrate (11) made of a material having an electro-optic effect. Coplanar-waveguide (CPW) modulating electrodes (13, 14) are disposed on a principal surface (11A) of the substrate (11). A dielectric layer (16) is disposed on a reverse surface (11B) of the substrate (11). A supporting substrate (17) having a recess (18) is disposed in contact with the dielectric layer (16) such that the recess (18) is located at a position corresponding to a modulating region (P). The relationship: µ r > µ s is satisfied where µ r represents the dielectric constant of the supporting substrate (17) and µ s represents the dielectric constant of the dielectric constant of solid, liquid, or gaseous substance in the recess (18).
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申请公布号 |
EP1445642(A2) |
申请公布日期 |
2004.08.11 |
申请号 |
EP20040250031 |
申请日期 |
2004.01.06 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
AOKI, KENJI;KONDO, JUNGO;KONDO, ATSUO;MITOMI, OSAMU |
分类号 |
G02F1/035;G02F1/225;(IPC1-7):G02F1/035 |
主分类号 |
G02F1/035 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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