APPARATUS FOR CONNECTING SENSOR CABLE OF LOADLOCK CHAMBER

摘要

PURPOSE: An apparatus for connecting a sensor cable of a loadlock chamber is provided to basically prevent a sensor cable from being disconnected by hardening of the sensor cable by using an arm and an elbow embodied with the sensor cable instead of the sensor cable pulled by vertical movement of an elevating axis. CONSTITUTION: A sensor block(50) is coupled to an end of the elevating axis to move together with the elevating axis, electrically connected to an optical sensor. A sensor cable tray(51) is installed in the bottom surface of the loadlock chamber. The sensor block is connected to the sensor cable tray by an elbow-coupled cable arm(53) including the sensor cable.