| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an inexpensive thin film piezoelectric resonator which can easily be made. <P>SOLUTION: The thin film piezoelectric resonator is equipped with a thin film piezoelectric resonant element 3 including a piezoelectric film 3a which is formed on a substrate 1 and in which a lower cavity 5 is formed from the substrate and its lower surface, a lower electrode 3b in contact with the lower surface of the piezoelectric film, and an upper electrode 3c in contact with an upper surface of the piezoelectric film and having a portion overlapped with the lower electrode, and having a first through hole 6 communicating with the lower cavity formed in the direction vertical to a film surface of the piezoelectric film, an upper cavity forming film 9 in which an upper cavity is formed with the upper surface of the piezoelectric film and which has a second through hole 8 communicating with the upper cavity formed in the direction vertical to the film surface, and a sealing layer 11 which covers the upper cavity forming layer and is formed to close the second through hole. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
