| 摘要 |
PROBLEM TO BE SOLVED: To support an exposure structural body with accuracy in a vacuum atmosphere in an aligner wherein a substrate is exposed in a vacuum atmosphere. SOLUTION: In the aligner wherein the substrate is exposed in a vacuum atmosphere, vibration-free mounts 11, 51, and 91 which are formed using metal bellows 59 are installed inside a vacuum chamber 3. The exposure structural body including a mask stage surface plate 6, a wafer stage surface plate 8, a tube surface plate 10, and the like which are placed inside the vacuum chamber is supported by the vibration-free mounts. COPYRIGHT: (C)2004,JPO&NCIPI |
