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发明名称
用于真空处理二度空间延伸的基板之设备以及用于制造此基板之方法
摘要
本发明有关用于真空处理二度空间延展的基板之设备,其包含:(a)真空运搬室,具有运搬机械人装置;(b)加工处理装置,具有至少一个工件加工处理站,以至少一个工件通过开口和真空运搬室来连通;(c)装载闸装置,以至少一个工件通过开口和真空运搬室来连通,也以至少再一个工件通过开口和该真空运搬室及该加工处理装置之外部大气来连通;(d1)一个单一装载闸–及加工处理塔台,由该加工处理装置及该装载闸装置以垂立式相互地积叠配置来形成。
申请公布号
TW200414297
申请公布日期
2004.08.01
申请号
TW092131975
申请日期
2003.11.14
申请人
恩艾克西斯巴尔斯股份有限公司
发明人
莱纳欧斯特曼;亚瑟布屈尔;穆斯塔法艾里阿可比
分类号
H01L21/02;H05K13/00
主分类号
H01L21/02
代理机构
代理人
何金涂;李明宜
主权项
地址
列支敦斯登
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