| 摘要 |
PROBLEM TO BE SOLVED: To provide a new reflection-type projection optical system which has eight reflection mirrors, which realizes high NA and has superior image forming performance, and to provide an aligner and a device manufacturing method. SOLUTION: In the reflection-type projection optical system, a pattern on an object face is projected in reduction on an image face. Eight reflecting mirrors reflecting light are arranged from an object side to an image face in the order of a first reflecting mirror, a second reflecting mirror, a third reflecting mirror, a fourth reflecting mirror, a fifth reflecting mirror, a sixth reflecting mirror, a seventh reflecting mirror and an eighth reflecting mirror. An intermediate image is formed in an optical path between the sixth reflecting mirror to the seventh reflecting mirror. In height direction positions of a main beam from optical axes in the respective reflecting mirrors, a displacement direction from the first reflecting mirror to the fourth reflecting mirror is made opposite to that from the fifth reflecting mirror to the eighth reflecting mirror, the reflecting mirrors from the second reflecting mirror to the fifth reflecting mirror are sequentially set to be a concave mirror, a convex mirror, the concave mirror and the concave mirror, the seventh reflecting mirror and the eighth reflecting mirror to be the convex mirror and the concave mirror, and the second reflecting mirror is arranged on a side nearest to the object face. COPYRIGHT: (C)2004,JPO&NCIPI
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