| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film transistor array substrate for an organic light emission display device which has uniform display characteristics. <P>SOLUTION: A thin film transistor display panel is manufactured through processes including a process of vapor-depositing an amorphous silicon layer, a process of changing the amorphous silicon layer into a polycrystalline silicon layer by a plurality of laser shots passed through a mask, a process of forming a gate insulating film on the polycrystalline silicon layer, a process of forming a gate wire on the gate insulating film, a process of forming a 1st inter-layer dielectric on the gate wire, a process of forming a data line on the 1st inter-layer dielectric, a process of forming a 2nd inter-layer dielectric on the data wire, and a process of forming a pixel electrode on the 2nd inter-layer dielectric. The mask used for the laser shots has a plurality of laser transmission areas and blocking areas, which are mixed according to a predetermined rule. Consequently, parts which are exposed to the different laser shots in laser irradiation for making the silicon layer polycrystalline are mixed with one another to prevent a border between laser shots from being recognized as a line. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
