| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample preparing apparatus and a sample preparing method by which the possibility of deteriorating a micro sample is little, the micro sample can be fixed to a sample holder in a short time, and in which there is no problem in TEM (transmitting electron microscope) observation and EDX (energy-distributed X-ray spectroscopic analysis) analysis even if reducing the work volume for the micro sample, in the preparation of samples for analysis. SOLUTION: The micro sample prepared by ion beam 104 processing is picked out with a probe 28, a voltage is impressed, under this condition, between the probe 128 and the micro sample holder 138 by a probe electrification circuit 139. Then, a probe driving device 129 is moved by a probe position controller 130, and a portion positioned in a root side by about 5μm from a tip of the probe 128 is made to approach an ear part end face of the sample holder 138 to fix the probe 128 and the sample holder 138 at a joining point by electrification welding. A root side with respect to the joining point for the probe 128 is cut thereafter by an ion beam 104, and the micro sample is fixed thereby to the sample holder 138 via the tip of the probe 128. COPYRIGHT: (C)2004,JPO&NCIPI
|
