发明名称 |
PIEZOELECTRIC ARRAY PROVIDED WITH DISTORTION DEPENDENT CONDUCTIVE ELEMENT AND ITS METHOD |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and structure which easily determine a change in the conductivity of nanotube by considering problems, defects and demerits in conventional methods and structure, and by applying stress to nanotube structure. <P>SOLUTION: As to structure (and a method) for a piezoelectric device including a piezoelectric material layer, the nanotube structure is attached so as to generate a stress change in the nanotube structure by a change in the shape of a piezoelectric material. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
申请公布号 |
JP2004207697(A) |
申请公布日期 |
2004.07.22 |
申请号 |
JP20030394630 |
申请日期 |
2003.11.25 |
申请人 |
INTERNATL BUSINESS MACH CORP <IBM> |
发明人 |
APPENZELLER JOERG;AVOURIS PHAEDON;MARTEL RICHARD;MISEWICH JAMES ANTHONY;SCHROTT ALEJANDRO GABRIEL |
分类号 |
B82B1/00;G11C13/02;H01L27/10;H01L27/20;H01L29/06;H01L41/09;H01L41/18;H01L41/187;H01L41/22;(IPC1-7):H01L41/09 |
主分类号 |
B82B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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