| 摘要 |
PROBLEM TO BE SOLVED: To simplify a manufacturing process, and also to provide an optical modulation element which is driven at a high speed, an optical modulation element array, display element, a method of manufacturing the optical modulation element, and a method of manufacturing the optical modulation element array. SOLUTION: The optical modulation element is such that a flexible thin film which is transparent to light to be modulated is provided opposite to a fixed electrode, the flexible thin film is deformed with an electromechanical action, and the transmissivity is varied, and the flexible thin film is formed in a single layer of an electrically conductive material. The flexible thin film is available by forming on an insulating film on a sacrificial layer, and removing the sacrificial layer after forming a stripe of an electrically conductive film on the sacrificial layer. COPYRIGHT: (C)2004,JPO&NCIPI
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