CONCAVE LENS, CONCAVE LENS ARRAY AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a concave microlens which is highly controlled in form without depending on wet etching, a concave microlens array and a manufacturing method thereof. SOLUTION: The manufacturing method of the concave microlens is provided with the steps of: forming a low softening point glass layer and a high softening point glass layer on a substrate (1); forming a mask pattern exposing a concave lens formation portion on the surface of the high softening point glass layer (2); applying dry etching to the high softening point glass layer and the low softening point glass layer to remain the low softening point glass layer corresponding to the concave lens formation portion for predetermined thickness (3); removing the mask pattern (4); and heating the substrate at a temperature softening only the low softening point glass layer to form recesses within the low softening point glass layer (5). COPYRIGHT: (C)2004,JPO&NCIPI