| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an electron emitting element of high efficiency of electron emission with little leakage current. <P>SOLUTION: The method for manufacturing an electron emitting element includes a process of locating conductive members 4 and 4 having a gap 5, and an activation process of applying specified a voltage pulse to the conductive members 4 and 4 under an atmosphere of a carbon compound. In the activation process, a voltage pulse which satisfies the relationship of T<10<SP>-5</SP>/P between interpulse time T(sec) and partial pressure P(Pa) of the carbon compound is applied. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
