发明名称 CMOS IMAGE SENSOR USING ION-IMPLANTED REGION AS ISOLATION LAYER AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A CMOS image sensor and a method for manufacturing the same are provided to improve the property of the image sensor by using an ion-implanted region as an isolation layer. CONSTITUTION: An epitaxial layer(22) is formed on a substrate(21). An isolation layer(25) composed of an ion-implanted region is formed to contact the substrate through the epitaxial layer. A p-type doping region(28) is formed in the epitaxial layer and a deep n-type doping region(29) is formed at the lower of the p-type doping region, thereby forming a photodiode. A floating diffusion region(30) is formed in the epitaxial layer spaced apart from the doping regions.
申请公布号 KR20040065332(A) 申请公布日期 2004.07.22
申请号 KR20030002190 申请日期 2003.01.13
申请人 HYNIX SEMICONDUCTOR INC. 发明人 HWANG, JUN
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
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