Thermionic-cathode for pre-ionization of an extreme ultraviolet (EUV) source supply

摘要

A source of soft x-rays in an Extreme Ultraviolet (EUV) lithography system may include a pre-ionization unit to pre-ionize a source material, e.g., a Xenon plasma. The pre-ionization unit may be integrated with a discharge unit, and may use Lanthanum Hexaboride (LaB6) as a thermionic emitter material.