| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a structure of a dimension of sub-wavelength on a substrate. <P>SOLUTION: A stamp having a waveguide structure 16 and a larger refractive index than that of a photoresist 12 is manufactured, and is stamped on the photoresist 12, which is formed on a substrate 14, capable of being deformed. An evanescent light is generated by receiving the light to the waveguide structure 16. The microphotoresist 12 adjacent to the waveguide structure 16 is exposed. After exposing, a sub-wavelength structure is formed by developing. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
