| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezo-electric/electrostrictive membrane type element having practically no reduction of the amount of a bending displacement with respect to the amount of an initial bending displacement even by continuous use for a long period of time, while suppressing the deterioration of the amount of the initial bending displacement of a driving unit due to the arrangement of a displacement transfer unit, and excellent in durability. <P>SOLUTION: The piezo-electric/electrostrictive membrane type element 10 is provided with an oscillation unit 20 consisting of a thin sheet of ceramics, a fixing unit 22 for supporting the oscillation unit 20 and consisting of ceramics, a driving unit 28 provided above the oscillation unit 20 and constituted of a piezo-electric/electrostrictive layer 27 and at least a pair of electrodes 26a, 26b which are provided so as to be contacted with a piezo-electric/electrostrictive layer 27, and the displacement transfer unit 30 provided above the driving unit 28 and constituted of a material having a hardness smaller than that of a material constituting the piezo-electric/electrostrictive layer 27 of the driving unit 28. In such an element 10, an intermediate layer 29 having a specified hardness is provided between the driving unit 28 and the displacement transfer unit 30. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
